平面碳传感器电导率计
HE-960LF/FS-09F-1/2平面碳传感器电导率计有效保持恒定的研磨液稀释度。保持适当的电导率值有助于保持晶圆抛光制程中的工艺稳定性。即使是高粘度样品液体（如 CMP 研磨液）也可以正常测量，因为其使用的传感器结构降低了样品液体附着在电极上的风险。同时，传感器由具有良好耐化学性的接液材料制成，符合半导体制程的清洁度要求。此外，它还可以用于半导体制程开发阶段的引入和特殊化学药液的电导率控制。
高精度/高稳定性
测量范围：0 至 2,000 μS/cm, 0 至 10,000 μS/cm
重复性：± 0.5% F.S.，± 1.0% F.S.
无金属污染
由于电极材料采用特殊碳制成，因此无需担心金属洗脱污染问题。
配备浓度换算功能
通过输入化学药液浓度和电导率之间的关系以及温度特性，可实现两种不同类型的浓度换算。
特别适用于低浓度化学品的稀释控制。
节省空间
通过缩小传统电导率传感器的尺寸，提高了安装布局的自由度。
安装式例
HE-960LF/FS-09F-1/2平面碳传感器电导率计规格
| Product name | Conductivity meter | |||
|---|---|---|---|---|
| Model | HE-960LF | |||
| Measurement method | Electrode type（2-electrode method） | |||
| Temperature specifications sensor | Platinum resistance 1000Ω/℃ | |||
| Measurement range | Cell constant | 0.1/cm | 1.0/cm | |
| Conductivity | 0.00 to 20.00μS/cm | 0.0 to 200.0μS/cm | ||
| 0.0 to 200.0μS/cm | 0 to 2000μS/cm | |||
| 0 to 1000μS/cm | 0 to 10000μS/cm | |||
| ＊Measuring range of raw conductivity Switched with setting change | ||||
| Temperature | 0 to 100℃ Actual temperature measuring range depend on the performance of the sensor connected. | |||
| Concentration conversion | Option 1,2 | 0 to 10.000% Conversion formula is defined by user (temperature compensation and concentration conversion) | ||
| Repeatability | Cell constant | 0.1/cm | 1.0/cm | |
| Conductivity | 0.00 to 20.00μS/cm range | 0.0 to 200.0μS/cm range | Within ±0.5% full scale | |
| 0.0 to 200.0μS/cm range | 0 to 2000μS/cm range | |||
| 0 to 1000μS/cm range | 0 to 10000μS/cm range | Within ±1.0% full scale | ||
| Temperature | ±0.5℃ | |||
| Condition | Equivalent input | |||
| Linearity | Cell constant | 0.1/cm | 1.0/cm | |
| Conductivity | 0.00 to 20.00μS/cm range | 0.0 to 200.0μS/cm range | Within ±0.5% full scale | |
| 0.0 to 200.0μS/cm range | 0 to 2000μS/cm range | |||
| 0 to 1000μS/cm range | 0 to 10000μS/cm range | Within ±1.0% full scale | ||
| Temperature | ±0.5℃ | |||
| Condition | Equivalent input | |||
| Transmission output | Number of output：4 DC4 to 20mA / 0 to 20mA input/output isolated type Maximum load resistance : 900Ω Transmission output range : Free setting within measuring range (Negative terminals of each transmission output channel are connected inside and thus have the same electrical potential.) | |||
| Contact output | Number of relay：5 ALARM contact R1,R2,R3 and R4 Contact type relay : Relay contact, SPST (1a） Contact rating：240 V AC,1 A or 30 V DC, 1 A(resistance load) Contact function Upper or lower ON/OFF alarm each measurement items. Contact action Closed when status is in the event. Opened when any erroneous status is normal or power is down. R1,R2 and R3 share a common terminal. Self diagnosis contact RF Contact type : relay contact , SPDT (1c) Contact rating：240 V AC,1 A or 30 V DC, 1 A(resistance load) C-NO contact action : Closed when status is normal. Opened when any erroneous status is detected or power is down. R4 and RF share a common terminal. | |||
| Contact input | Number of input：1 | |||
| Contact type：open collector. No-voltage contact | ||||
| Function : Hold command | ||||
| Communication output | RS-485 communication | |||
| Self-check | Sensor diagnosis (Short-circuit and disconnection of the temperature sensor). Converter error | |||
| Temperature compensation of conductivity | ● Arbitrary temperature coefficient entry (reference temperature : 25℃, temperature coefficient : 0%/℃ to 5%/℃） ● Arbitrary temperature compensation formula entry (reference temperature : 25℃, formula is defined by user) ● No temperature compensation is performed. | |||
| Temperature compensation range | 0 to 100℃ The temperature compensation under 0℃ and over 100℃ is expanded by a function | |||
| Ambient temperature | 5 to 45℃ | |||
| Relative humidity | －25 to 65℃ | |||
| Power supply | Rated voltage 24 V DC, 10W (max.) | |||
| Structure | Indoor-use panel installation type Panel case ： ABS, terminal : PBT Panel : IP65 dust and water proof structure | |||
| Conforming standards | CE Marking | EMC Directive : EN61326-2-3 | ||
| FCC Rule | FCC Part15 | |||
| Mass | Approx. 550g | |||
| External dimensions | 96 (W) × 96 (H) × 115 (D) mm Case depth : approx. 105mm (when panel-mounted） | |||
| Compatible sensors | FS-09F-1/2 | |||
上海默威生物科技有限公司一直专注于水质分析仪、生物化学、生命科学仪器与环境监测仪器的研发生产销售等一体式服务公司。公司拥有自主“MOWEAL"品牌，主要生产产品覆盖水质分析仪、环境监测仪、生命科学仪器等领域，能随时为广大用户提供全程贴心服务，并能提供完善的产品组合和方案。公司主营产品：PH计/酸度计、电导率测定仪、溶解氧测定仪、化学需氧量COD/生化需氧量BOD快速测定仪、紫外可见分光光度计、噪音计、紫外线灯、紫外交联仪、实验室分析仪器等等。
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